01 / The question
Does the fabricated device match the simulated one?
Diodes and MOS capacitors link process choices to electrical behaviour. This project combined the simulated process with cleanroom work and measurements on the resulting devices.
02 / The intuition
A mechanism worth testing.
Compare design intent, fabricated structure and electrical response. Disagreement between them is useful evidence about the process.
03 / The work
Inside the method.
Explore each part of the approach.
01Predict the structure
Silvaco Athena and Atlas supported process-flow and electrical simulation, including oxidation, doping and metallisation.
02Build the devices
Cleanroom fabrication included lithography and device-processing steps for P–N diodes and MOS capacitors.
03Characterise
I–V and C–V measurements, profilometry and resistivity measurements examined the fabricated structures.
04 / The observations
What emerged.
The notes report differences between expected and measured layer properties and practical measurement constraints. The Silvaco work is included here as part of the same fabrication-to-characterisation story.
This account is based on recorded project notes. Original reports, figures and datasets are not embedded here.
05 / The limits
Where the evidence stops.
The original process sheets and measurement curves are required for quantitative device claims. The same project appeared in two subject files and is counted only once here.
The academic foundations